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安川電機「提供可以讓客戶滿足的電機部品」
輪億企業有限公司 馬牌皮帶
科藝儀器有限公司(台灣) 雷射雕刻機

ABL1500 Air-Bearing Direct-Drive Linear Stage

ABL1500 Air-Bearing Direct-Drive Linear Stage

Design Features

  • Designed for high-performance scanning and inspection
  • Active air preload on all air bearing surfaces
  • Linear encoder feedback provides subnanometer resolution
  • High stiffness for heavy loads and excellent geometric performance
  • Travel up to 500 mm

Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500 air bearing stage, with its fully active preload, exceptionally high stiffness and excellent geometric characteristics was designed specifically to meet those demands.

Air-Bearing Design for High Dynamic Performance

The ABL1500 incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.

Linear Motor Drive

The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance.

Zero Maintenance

Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.

Cable Management

We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.

 

Ordering Example

ABL15 010 -M -10 -NC -LN10AS -SINGLE-CMS

Ordering Options

Series Travel Mounting and Grid Pattern Motor Limits Linear Encoder Options
ABL15 005
010
020
030
040
050
-M -10 -NC -LTnnAS
-LTnnX50
-LNnnAS
-SINGLE-CMS
-XY-CMS

ABL1500 Series Linear Air-Bearing Stage

Option Description
ABL15005 50 mm (2 in) travel linear air-bearing stage with linear motor and limits
ABL15010 100 mm (4 in) travel linear air-bearing stage with linear motor and limits
ABL15020 200 mm (8 in) travel linear air-bearing stage with linear motor and limits
ABL15030 300 mm (12 in) travel linear air-bearing stage with linear motor and limits
ABL15040 400 mm (16 in) travel linear air-bearing stage with linear motor and limits
ABL15050 500 mm (20 in) travel linear air-bearing stage with linear motor and limits

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes

Motor

Option Description
-10 Brushless linear motor (BLMC-192-A)

Limits

Option Description
-NC Normally-closed end of travel limit switches (standard)

Standard Linear Encoders

Option Description
-LT05AS Linear encoder for ABL15005; amplified sine output
-LT10AS Linear encoder for ABL15010; amplified sine output
-LT20AS Linear encoder for ABL15020; amplified sine output
-LT30AS Linear encoder for ABL15030; amplified sine output
-LT40AS Linear encoder for ABL15040; amplified sine output
-LT50AS Linear encoder for ABL15050; amplified sine output
-LT05X50 Linear encoder for ABL15005; 0.1 micron line driver output
-LT10X50 Linear encoder for ABL15010; 0.1 micron line driver output
-LT20X50 Linear encoder for ABL15020; 0.1 micron line driver output
-LT30X50 Linear encoder for ABL15030; 0.1 micron line driver output
-LT40X50 Linear encoder for ABL15040; 0.1 micron line driver output
-LT50X50 Linear encoder for ABL15050; 0.1 micron line driver output

High-Accuracy Linear Encoders

Option Description
-LN05AS High-accuracy linear encoder for ABL15005; amplified sine output
-LN10AS High-accuracy linear encoder for ABL15010; amplified sine output
-LN20AS High-accuracy linear encoder for ABL15020; amplified sine output
-LN30AS High-accuracy linear encoder for ABL15030; amplified sine output
-LN40AS High-accuracy linear encoder for ABL15040; amplified sine output
-LN50AS High-accuracy linear encoder for ABL15050; amplified sine output

Options

Option Description
-SINGLE-CMS Cable management system for single-axis applications
-XY-CMS Cable management system for X-Y assembly

Accessories (to be ordered as separate line item)

Option Description
HALAR High-accuracy system linear error correction for accuracy and repeatability
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal

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